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A Practical Guide to Surface Metrology

Af: Michael Quinten Engelsk Paperback
SPAR
kr 253

A Practical Guide to Surface Metrology

Af: Michael Quinten Engelsk Paperback

This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context.

Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).

The book provides:

  • Overview of the working principles
  • Description of advantages and disadvantages
  • Currently achievable numbers for resolutions, repeatability, and reproducibility
  • Examples of real-world applications

A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can   reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial    applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of
surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.

 

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This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context.

Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).

The book provides:

  • Overview of the working principles
  • Description of advantages and disadvantages
  • Currently achievable numbers for resolutions, repeatability, and reproducibility
  • Examples of real-world applications

A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can   reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial    applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of
surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.

 

Produktdetaljer
Sprog: Engelsk
Sider: 230
ISBN-13: 9783030294564
Indbinding: Paperback
Udgave:
ISBN-10: 3030294560
Udg. Dato: 26 aug 2021
Længde: 16mm
Bredde: 154mm
Højde: 234mm
Forlag: Springer Nature Switzerland AG
Oplagsdato: 26 aug 2021
Forfatter(e): Michael Quinten
Forfatter(e) Michael Quinten


Kategori Kondenserede fasers fysik: væskeform og faststoffysik


Sprog Engelsk


Indbinding Paperback


Sider 230


Udgave


Længde 16mm


Bredde 154mm


Højde 234mm


Udg. Dato 26 aug 2021


Oplagsdato 26 aug 2021

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