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Scanning Probe Lithography

Af: Javier Martinez Rodrigo, Yu Kyoung Ryu Engelsk Hardback
SPAR
kr 178

Scanning Probe Lithography

Af: Javier Martinez Rodrigo, Yu Kyoung Ryu Engelsk Hardback

The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials.

• Introduces historical background of SPL, including evolution of the technique and tools

• Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied

• Shows the different types of devices and structures fabricated by SPL, together with the processing steps

• Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups

• Summarizes strengths, limitations, and potential of SPL

This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.

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The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials.

• Introduces historical background of SPL, including evolution of the technique and tools

• Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied

• Shows the different types of devices and structures fabricated by SPL, together with the processing steps

• Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups

• Summarizes strengths, limitations, and potential of SPL

This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.

Produktdetaljer
Sprog: Engelsk
Sider: 128
ISBN-13: 9781032122144
Indbinding: Hardback
Udgave:
ISBN-10: 1032122145
Udg. Dato: 22 dec 2022
Længde: 14mm
Bredde: 162mm
Højde: 241mm
Forlag: Taylor & Francis Ltd
Oplagsdato: 22 dec 2022
Forfatter(e) Javier Martinez Rodrigo, Yu Kyoung Ryu


Kategori Laserteknologi og holografi


Sprog Engelsk


Indbinding Hardback


Sider 128


Udgave


Længde 14mm


Bredde 162mm


Højde 241mm


Udg. Dato 22 dec 2022


Oplagsdato 22 dec 2022

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